| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the generation of defective devices due to variations in discharge characteristic among nozzles by detecting the discharge characteristic of each nozzle electrically in a short time, and correcting head action. Ž<P>SOLUTION: An inkjet unit for manufacturing a device includes an inkjet head 101 which discharges ink droplets to a pattern formation area 103 of a base 102, and a dummy area 104 in a portion other than the pattern formation area 103. The inkjet head 101 discharges ink droplets onto the dummy area 104, and a high-frequency circuit characteristic evaluation device 105 detects the position, the size and the shape of each ink droplet discharged. Depending on the detection result, a predetermined process (purging process, wiping process, flashing process or the like) is performed on the inkjet head 101 and the action to discharge an ink droplet onto the pattern formation area 103 is performed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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