发明名称 User Interface for Wafer Data Analysis and Visualization
摘要 A wafer viewer system is provided for graphical presentation and analysis of a wafer and a wafer series. More specifically, the wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer for analysis, performing analysis on the selected regions of the wafer, and displaying results of the analysis.
申请公布号 US2010211903(A1) 申请公布日期 2010.08.19
申请号 US20100772881 申请日期 2010.05.03
申请人 LAM RESEARCH CORPORATION 发明人 LUQUE JORGE
分类号 G06F3/048;H01L21/66 主分类号 G06F3/048
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