Verfahren zur Herstellung eines Mehrschichtkörpers sowie Mehrschichtkörper

摘要

The invention concerns a process for the production of a multi-layer body, wherein the multi-layer body includes at least two functional layers on a top side of a carrier substrate, which are structured in register relationship with each other, by a procedure whereby an underside of the carrier substrate is prepared in such a way that in a first region there results a transparency for a first exposure radiation and in at least one second region there results a transparency for at least one second exposure radiation different therefrom in register relationship with the first region, the underside is successively exposed with the first and the at least one second exposure radiation and the first exposure radiation is used for structuring a first functional layer and the at least one second exposure radiation is used for structuring at least one second functional layer on the top side of the carrier substrate.