| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly rigid mechanical quantity sensor capable of dampening vibration without need for high processing precision and facilitating setting of a spring constant, and to provide a method of manufacturing the same. <P>SOLUTION: A portion between an internal unit 11 and a casing 12 is bonded and supported by a vibration isolating member 15. The vibration isolating member 15 is flexible, which absorbs relative vibration at the portion between the internal unit 11 and the casing 12 while bonding the portion between the internal unit 11 and the casing 12. By changing a thickness or width of the vibration isolating member 15, the vibration isolating member 15 allows easy change of the strength and spring constant thereof. Thus, the relative vibration between the internal unit 11 and the casing 12 can be dampened without degradation in the strength and without need for high processing precision. Further, the spring constant of the vibration isolating member 15 can be set easily. <P>COPYRIGHT: (C)2010,JPO&INPIT |
