发明名称 CRYSTAL VIBRATION PIECE AND METHOD OF MANUFACTURING THE SAME, VIBRATOR, OSCILLATOR, AND ELECTRONIC EQUIPMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a compact crystal vibration piece having stable frequency characteristics, to provide a method of manufacturing the crystal vibration piece, to provide a vibrator, to provide an oscillator, and to provide electronic equipment. <P>SOLUTION: The tuning fork crystal vibration piece 1 includes: a vibration reed 102 having a base 110 and a pair of tuning fork arms 121, 122 extended from the base 110 parallel mutually; excitation electrodes 123a, 124a formed on both the main surfaces of the tuning fork arms 121, 122; and drive electrodes 123b, 124b formed on both the sides of the tuning fork arms 121, 122. Modified sections 151, 152 having a texture structure differing from that of crystal are formed at least at one part of the tuning fork arms 121, 122. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010183140(A) 申请公布日期 2010.08.19
申请号 JP20090022309 申请日期 2009.02.03
申请人 SEIKO EPSON CORP 发明人 KITAMURA FUMITAKA
分类号 H03H9/215;H01L41/09;H01L41/18;H01L41/22;H01L41/23;H01L41/311;H01L41/41;H03B5/32;H03H3/02;H03H9/19 主分类号 H03H9/215
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