| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe for inspection of an electro-optical device which is excellent in contact properties and is improved in durability, and to provide a method for manufacturing the same, and an apparatus for inspection. SOLUTION: The probe for inspection of the electro-optical device includes a substrate 2 and a connecting part which is provided in the substrate 2 and connected electrically with the electro-optical device. The connecting part includes a plurality of contact terminals 11 each of which is composed of a substrate resin 9 disposed in a through-hole 7 of the substrate 2, and of a plurality of conductive films 15 covering partially the substrate resin 9 projecting from the first surface 2A of the substrate 2. The through-hole 7 is so formed that at least a part of the inner wall surface 7a is shaped into a taper narrowing the internal diameter of the through-hole 7 toward the second surface 2B side of the substrate 2. COPYRIGHT: (C)2010,JPO&INPIT |
