发明名称 LIQUID JET HEAD, LIQUID JET APPARATUS, AND METHOD FOR MANUFACTURING LIQUID JET HEAD
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid jet head is which man-hours can be reduced by efficiently processing a sealing plate. Ž<P>SOLUTION: The method for manufacturing a liquid jet head 1000 includes a step of forming a piezoelectric element 200 above a substrate 100, a step of forming a sealing plate 300, and a step of sealing the piezoelectric element 200 by arranging the sealing plate 300 above the substrate 100. The step of forming the sealing plate 300 includes a step of preparing a glass substrate 310, a laser irradiation step of forming an etching region 312 by irradiating the glass substrate 310 with a laser beam 10, and a step of removing the etching region 312 by a wet etching. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010179622(A) 申请公布日期 2010.08.19
申请号 JP20090027066 申请日期 2009.02.09
申请人 SEIKO EPSON CORP 发明人 TAKAKUWA ATSUSHI;AMAKO ATSUSHI;YOSHIMURA KAZUTO
分类号 B41J2/16;B41J2/045;B41J2/055 主分类号 B41J2/16
代理机构 代理人
主权项
地址