摘要 |
PROBLEM TO BE SOLVED: To provide a molding manufacturing method which improves quality of a molding, a method for manufacturing a storage medium, and an information storage device. SOLUTION: A manufacturing device forms a mask layer on a substrate, forms a surface processing layer on the mask layer, and arrange fine particles on the surface processing layer. The manufacturing device etches the fine particles and a part of the surface processing layer with a first etching gas chemically reactive with the fine particles and the surface processing layer so as to form the surface processing layer in the shape of islands and exposes a part of a surface of the mask layer. The manufacturing device forms the mask layer in the shape of islands with a second etching gas chemically reactive with the mask layer so as to expose a part of the substrate. The manufacturing device etches the exposed substrate and the surface processing layer in the shape of islands d with the first etching gas so as to form a predetermined irregular pattern on the substrate. COPYRIGHT: (C)2010,JPO&INPIT
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