发明名称 A LINEAR ORGANIC EVAPORATION CELL
摘要 PURPOSE: A linear organic deposition apparatus is provided to enable continuous process of hundreds hours using a plurality of nozzles formed at regular intervals and form an organic film on a large substrate using a large linear cell. CONSTITUTION: A linear organic deposition apparatus(100) comprises an organic material storage(110), a minute feeder(120), a vaporizer(130), and a linear cell(140). The linear cell comprises an evaporation channel, a main tube, and a plurality of nozzles. The evaporation channel interlinks the vaporizer and the main tube in order to transfer gas organic compounds provided from the vaporizer to the main tube. The nozzles are formed at regular intervals in the main tube.
申请公布号 KR20100091520(A) 申请公布日期 2010.08.19
申请号 KR20090010744 申请日期 2009.02.10
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 CHOI, BUM HO;LEE, JONG HO;KIM, YOUNG MI;PARK, YEONG HO;LEE, JAE SEUNG;KIM, JONG WOON
分类号 C23C14/24;C23C14/12 主分类号 C23C14/24
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