SEMICONDUCTOR ELEMENT, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of securing the rigidity of an element substrate and efficiently supplying hydrogen to a gate insulating film, at the same time.

SOLUTION: A method of manufacturing a semiconductor element has the steps of: forming a transistor 3 and wiring layers 12 and 16 electrically connected therewith on a first surface of an element substrate 2; forming a plurality of holes 21 in a second surface opposite to the first surface of the element substrate 2; and supplying hydrogen to a gate insulating film 5 of the transistor 3 from the second surface of the element substrate 2 through the holes 21.

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