| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard coating which has excellent hardness and lubricity, and is used in cutting tools such as chip, drill and end mill, forging dies, and tools such as blanking punch, and also to provide related technologies. SOLUTION: The hard coating comprises (Al<SB>1-a-d-e</SB>V<SB>a</SB>Mo<SB>d</SB>W<SB>e</SB>)(C<SB>1-X</SB>N<SB>X</SB>), wherein 0.2≤a≤0.75, 0<d+e≤0.3 and 0.3≤X≤1 (wherein a, d, e and X are each independently an atomic ratio with the proviso that d and e are not simultaneously 0 while one of d and e may be 0). The hard coating is formed, for example, using an AIP apparatus comprising a chamber 1, arc evaporation source 2, support 3, bias source 4, target 6, arc source 7, means 8 for generating a magnetic field, gas outlet 11, gas inlet 12 and workpiece W. COPYRIGHT: (C)2010,JPO&INPIT |
