| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor-testing device for suppressing expansion of damage to specimens by continuation currents after the specimens are destroyed and damage to testing circuits. SOLUTION: A discharge rejection type snubber circuit 23 is used as a snubber circuit that is provided between a power supply section 21 and a specimen 10 and absorbs surge voltages generated in turn-off of a semiconductor switch 22a for breaking current flowing through the specimen 10 when the specimen 10 is broken, thus reducing continuation currents flowing after turn-off of the semiconductor switch 22a and suppressing expansion of damage to the specimen 10 and damage to the testing circuit. COPYRIGHT: (C)2010,JPO&INPIT
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