| 摘要 |
<p>A lithographic workpiece processing tool includes a loading area (108) for loading a workpiece; and a processing area (106) for processing a workpiece. The workpiece processing tool further includes a multi-table system (10) arranged between the loading area and the processing area. The multi-table system includes at least two tables (110, 112) configured to pass each other while moving between the loading area and the processing area. Each of the at least two tables is configured to hold a workpiece.</p> |
