| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gap adjusting device and the like capable of adjusting a work gap to as a small value as possible by precisely measuring the displacement of a nozzle plane in the up and down directions. <P>SOLUTION: The gap adjusting device comprises a position measuring means 181 for measuring respectively positions in the up and down directions for a plurality of places of a nozzle plane 103 departed from each other, a gap measuring system transferring mechanism 24 for transferring a function droplet ejection head 81 with respect to the position measuring means 181, an ascending and descending means 132 for fine adjusting a work gap by transferring the function droplet ejection head 81 in the up and down directions with respect to a workpiece W, a control means 3 for controlling the ascending and descending means 132 from a measured result of the position measuring means 181 wherein the control means 3 controls the ascending and descending means 132 so that a departed distance between a nearest position among a plurality of measured results by the position measuring means 181 and the surface of the workpiece W may become a set work gap. <P>COPYRIGHT: (C)2010,JPO&INPIT |
