| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus of manufacturing an electrooptical device that is configured to smoothly move up and down a lift pin in the through hole of a susceptor. SOLUTION: The apparatus of manufacturing an electrooptical device includes: a chamber 60; the susceptor 61 which is provided in the chamber 60, and on which a substrate 10' is placed and a through hole 63 is provided; the lift pin 62 which is inserted into the through hole 63 to support the substrate 10' by freely moving up and down the substrate; a contact part 62p1 which is formed on an outer peripheral surface 62g on the side of a lower end 62i of the lift pin 62, and which comes into contact with an inner peripheral surface 63n of the through hole 63; a non-contact part 62p2 which is formed shorter than the length of the through hole 63, on the outer peripheral surface 62g on the side of an upper end 62t of the lift pin 62, and which is not in contact with the inner peripheral surface 63n of the through hole 63; and a lift bar 65 which moves up and down the lift pin 62 in a state of being in contact with the lower end 62i of the lift pin 62, to move up and down the substrate 10' supported at the upper end 62t of the lift pin 62. COPYRIGHT: (C)2010,JPO&INPIT |
