| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for three-dimensional measurement which performs correction of a measured coordinate value with high accuracy and performs measurement of a three-dimensional shape in a short time with high accuracy. Ž<P>SOLUTION: The apparatus 100 for three-dimensional measurement includes a surface plate 2 on which a measuring object 3 is placed, a measuring part 4 which has an optical system for measuring the three-dimensional shape of the measuring object 3, a moving mechanism A of the measuring part 4, and a measuring error correcting part 50 which determines a corrective value for correcting the coordinate axis measured by the measuring part 4. This measuring error correcting part 50 is composed of a Z reference mirror 10, an X reference mirror 11, a Y reference mirror 12, a six-axis laser interference length measuring gage 9 which determines position coordinates of the measuring part 4, and a corrective coordinate value calculating part 13 which determines the coordinate value after correction, by adding the corrective value to the coordinate value measured by the measuring part 4. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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