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发明名称
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND STORAGE MEDIUM
摘要
申请公布号
KR100976882(B1)
申请公布日期
2010.08.18
申请号
KR20080080065
申请日期
2008.08.14
申请人
发明人
分类号
H01L21/3065;H01L21/306
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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