Method for fabricating solar cell using inductively coupled plasma chemical vapor deposition

摘要

A method for fabricating a solar cell using inductively coupled plasma chemical vapor deposition (ICP-CVD) including a first electrode, a P layer, an intrinsic layer, an N-type layer and a second electrode. The method includes forming an intrinsic layer including a hydrogenated amorphous silicon (Si) thin film by an inductively coupled plasma chemical vapor deposition (ICP-CVD) device using mixed gas including hydrogen (H 2 ) gas and silane (SiH 4 ) gas. In the mixed gas, silane gas is in a ratio of 8 to10 relative to mixed gas.