A silicon-ceramic composite substrate includes a low-temperature ceramic having at least one pre-formed ceramic layer and a silicon substrate. The low-temperature ceramic forms a carrier layer and the silicon substrate surface has a contact area with nanostructures) that completely penetrate into the low-temperature ceramic.
申请公布号
EP2218101(A2)
申请公布日期
2010.08.18
申请号
EP20080856359
申请日期
2008.12.04
申请人
TECHNISCHE UNIVERSITAET ILMENAU;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
FISCHER, MICHAEL;BARTSCH DE TORRES, HEIKE;HOFFMANN, MARTIN;MUELLER, JENS;PAWLOWSKI, BEATE;BARTH, STEFAN
