| 摘要 |
PURPOSE: A unit of cleaning a substrate capable of cleaning a glass substrate by a constant pressure and a system of cleaning a glass substrate having the same are provided to effectively remove a foreign material on a surface of a glass substrate. CONSTITUTION: A conveyer unit(100) horizontally sends back a glass substrate. A cleaning units(200) is installed on a moving path of the glass substrate which is sent back by the conveyer unit. The cleaning units applies scrubbing force which rotates and moves long the trace of a circle. The cleaning units removes foreign material on a surface of the galas substrate. Each cleaning units includes outlet hole and scrubbing member. |
