摘要 |
The presently disclosed subject matter describes the use of fluorinated elastomer-based materials, in particular perfluoropolyether (PFPE)-based materials, in high-resolution soft or imprint lithographic applications, such as micro- and nanoscale replica molding, and the first nano-contact molding of organic materials to generate high fidelity features using an elastomeric mold. Accordingly, the presently disclosed subject matter describes a method for producing free-standing, isolated nanostructures of any shape using soft or imprint lithography techniques. |
申请人 |
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL;NORTH CAROLINA STATE UNIVERSITY |
发明人 |
DESIMONE, JOSEPH, M.;ROLLAND, JASON, P.;EXNER, ANSLEY, E.;SAMULSKI, EDWARD, T.;SAMULSKI, R., JUDE;MAYNOR, BENJAMIN, W.;EULISS, LARKEN, E.;DENISON, GINGER, M. |