发明名称 METHOD OF MANUFACTURING A PRINTER HEAD HAVING AN ELECTROSTATIC ACTUATOR
摘要 <p>After a movable electrode is formed on a sacrificial layer on a fixed electrode, the sacrificial layer is removed to form a space between the fixed electrode and the movable electrode. Thus, simple and accurate manufacture as well as simple integration of, for example, a driving circuit can be achieved. <IMAGE></p>
申请公布号 EP1361065(B1) 申请公布日期 2010.08.18
申请号 EP20020712341 申请日期 2002.02.14
申请人 SONY CORPORATION 发明人 TANIKAWA, TORU;USHINOHAMA, IWAO
分类号 B41J2/16;B41J2/045;B41J2/055 主分类号 B41J2/16
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