发明名称 |
METHOD OF MANUFACTURING A PRINTER HEAD HAVING AN ELECTROSTATIC ACTUATOR |
摘要 |
<p>After a movable electrode is formed on a sacrificial layer on a fixed electrode, the sacrificial layer is removed to form a space between the fixed electrode and the movable electrode. Thus, simple and accurate manufacture as well as simple integration of, for example, a driving circuit can be achieved. <IMAGE></p> |
申请公布号 |
EP1361065(B1) |
申请公布日期 |
2010.08.18 |
申请号 |
EP20020712341 |
申请日期 |
2002.02.14 |
申请人 |
SONY CORPORATION |
发明人 |
TANIKAWA, TORU;USHINOHAMA, IWAO |
分类号 |
B41J2/16;B41J2/045;B41J2/055 |
主分类号 |
B41J2/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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