| 摘要 |
<p>PURPOSE: A substrate transfer device is provided to prevent substrates loaded on a loader from being overlapped by minutely vibrating the substrate loaded on the loader. CONSTITUTION: A vacuum adsorption unit(30) adsorbs a substrate loaded on a loader. A load cell(162) is arranged between a vertical transfer unit and a vacuum absorption unit. A controller(164) processes the signal of the load cell. An indicator(166) indicates the overlap state of two substrates according to the control of the controller. A plurality of guide rollers is arranged on the inner wall of the loader. A vibration device(26) is loaded on the loader to minutely vibrate the substrate loaded on the loader. The vibration device is a vibration motor.</p> |
