发明名称 OPENING - CLOSING VALVE FOR VACUUM LINE
摘要 PURPOSE: An opening/closing valve for a vacuum line is provided to solve problems generated by vertically moving a protector by installing the protector which is prevented from being affected by by-products. CONSTITUTION: An opening/closing valve for a vacuum line comprises a body(100), a disc(200), an actuator(300) for the disk, a protector(400), a protector shift(500), and an actuator for the protector shift. The disk is installed inside the body. The disc opens and closes a fluid passage(140) by sliding along a disk channel. The actuator for a disk slides the disc. The outer surface of the protector shift is placed on the bottom of the groove formed in an outflow part(120). The actuator for the protector shift horizontally moves the protector shift.
申请公布号 KR20100090926(A) 申请公布日期 2010.08.18
申请号 KR20090010157 申请日期 2009.02.09
申请人 TERATECH CO., LTD. 发明人 HONG, HYEOK JIN;KIM, MIN CHEOL
分类号 F16K51/02;F16K3/30;G02F1/13;H01L21/00 主分类号 F16K51/02
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