发明名称 UNIT FOR CLEANING GLASS SUBSTRATE AND SYSTEM FOR CLEANING GLASS SUBSTRATE HAVING THE SAME
摘要 PURPOSE: A unit for cleaning a glass substrate and a system for cleaning a glass substrate with the same are provided to clean a glass substrate by uniform pressure. CONSTITUTION: Cleaning units(200) are installed on a transfer path of a glass substrate returned by a conveyer unit. The cleaning units make scrubbing power. The cleaning units eliminate foreign materials from the surface of the glass substrate. Each cleaning unit comprises a scrubbing member, a cylinder, and a pneumatic supply unit. The scrubbing member has a cleaning head contacting the surface of the glass substrate.
申请公布号 KR20100091036(A) 申请公布日期 2010.08.18
申请号 KR20090010310 申请日期 2009.02.09
申请人 SEMES CO., LTD. 发明人 JANG, KYUNG DUK
分类号 G02F1/13;H01L21/02 主分类号 G02F1/13
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