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发明名称
PELLICLE FOR HIGH NUMERICAL APERTURE EXPOSURE DEVICE
摘要
申请公布号
EP1983370(A4)
申请公布日期
2010.08.18
申请号
EP20070707738
申请日期
2007.01.30
申请人
MITSUI CHEMICALS, INC.
发明人
KONDOU, MASAHIRO;NAKANO, TOSHIHIKO
分类号
G03F1/62;H01L21/027
主分类号
G03F1/62
代理机构
代理人
主权项
地址
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