| 摘要 |
An apparatus includes a light source (LD), a scale (SC) which is configured to have first and second diffraction grating portions (GT1 and GT2) which differ from each other in a grating pitch, a light receiving portion (PD) configured to receive first and second interference light fluxes generated from interference of a plurality of diffraction light fluxes, at the first and second diffraction grating portions, respectively, a light flux emitted from the light source and have different orders of diffraction, and to output first and second periodic signals based on an intensity of the first and second interference light fluxes, respectively, and computing means (LO) configured to output, based on the first and second periodic signals (U1, V1, and W1, and U2, V2, and W2) a signal representing an origin of displacement of the scale. |
