发明名称 METHOD FOR MANUFACTURING THIN FILM TRANSISTOR
摘要 <p>A method for manufacturing a thin film transistor (TFT) is disclosed. The method is achieved by forming and defining a source and a drain of a thin film transistor through two lithographic processes cycles so that the channel length (L) of the thin film transistor can be reduced to 1.5 to 4.0μm. Besides, the Ion current of the thin film transistor is increased as the channel length (L) is decreased. Therefore, the component area of the thin film transistor is decreased as the channel width (W) is decreased. Thus, the aperture ratio of the TFT-LCD can be increased due to the decreased component area of the thin film transistor.</p>
申请公布号 KR100976931(B1) 申请公布日期 2010.08.18
申请号 KR20090095772 申请日期 2009.10.08
申请人 发明人
分类号 H01L29/786 主分类号 H01L29/786
代理机构 代理人
主权项
地址