| 发明名称 |
Antihalation compositions |
| 摘要 |
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
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| 申请公布号 |
US7776508(B2) |
申请公布日期 |
2010.08.17 |
| 申请号 |
US20070981621 |
申请日期 |
2007.10.31 |
| 申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
THACKERAY JAMES W.;ORSULA GEORGE W. |
| 分类号 |
G03F7/00;G03F7/004;G03F7/038;G03F7/09;G03F7/11;G03F7/38;H01L21/027 |
主分类号 |
G03F7/00 |
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