发明名称 Method of fabricating semiconductor device having multiple gate insulating layer
摘要 A method of fabricating a semiconductor device is provided. The method includes preparing a semiconductor substrate having first and second regions, forming a mask layer pattern on the second region, growing an oxidation retarding layer on the first region and removing the mask layer pattern. The method further includes growing a silicon oxide layer on the semiconductor substrate to form gate insulating layers having different thicknesses from one another on the first and second regions.
申请公布号 US7776761(B2) 申请公布日期 2010.08.17
申请号 US20060476505 申请日期 2006.06.28
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK CHAN-SIK
分类号 H01L21/31;H01L21/469 主分类号 H01L21/31
代理机构 代理人
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