APPARTUS FOR INSPECTING SUBSTRATE AND METHOD USING THE SAME

摘要

PURPOSE: A device and a method for inspecting a substrate are provided to use one optical sensor or a few numbers of optical sensors, thereby inspecting a crack of a substrate. CONSTITUTION: A substrate has a horizontal edge and vertical edge. The horizontal edge is parallel to sending direction of the substrate. The vertical edger is vertical to a sending direction of the substrate. At least one of optical sensors(500) inspects the vertical edge of the substrate. An optical sensor moving part moves the optical sensor.