INRICHTING VOOR HET OPWEKKEN VAN EXTREEM ULTRAVIOLETTE STRALING DOOR MIDDEL VAN ELEKTRISCHE ONTLADING AAN REGENEREERBARE ELEKTRODEN.

摘要

The arrangement has electrodes arranged in the form of band electrodes (21, 22), where each band electrode is guided into containers (24, 25) filled with metal melt (26). Each band electrode with an expanded section is immersed in the metal melt. A drive unit (3) is provided for each electrode, where each electrode is immersed into the containers during circulation into the containers, directed into a vacuum chamber (1) in the place of desired plasma generation and is re-guided into the containers after electrical discharge between the electrodes.