| 摘要 |
An exposure apparatus for a flat panel display device includes: a light source; a stage having a horizontal support surface on which a substrate may be disposed; a mask vertically arranged with respect to the horizontal support surface; a frame surrounding an edge of the mask; and an optical system between the light source and the stage, the optical system controlling a direction of a light from the light source through the mask to irradiate the light onto the stage. The invention also includes a method for exposing including disposing a substrate on the stage, the substrate including a thin film and a photoresist layer on the thin film; and irradiating light from the light source through the mask and via the optical system onto a portion of the photoresist layer on the substrate.
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