| 摘要 |
PURPOSE: A method and a device for removing static electricity of rubbing device are provided to remove static electricity without suing high cost ion blower. CONSTITUTION: A contact member(124) is connected to the upper side of the substrate mounted in a stage of rubbing device. The contact member has conductivity. The contact member is formed on end part of a rotary arm(122). The rotary arm has the conductivity. A rotary unit(120) rotates the rotary arm so that the contact member can touch with the upper side of the substrate. An up and down part(130) moves the rotary arm and the rotary unit up and down. |
