发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE
摘要 PURPOSE: A semiconductor device and a method for manufacturing the same are provided to improve the electrical characteristic of a thin film transistor using an oxide semiconductor film. CONSTITUTION: A gate electrode layer(401) and a gate insulating layer(402) are successively formed on a substrate with an insulating surface. A first oxide semiconductor layer(403) includes In, Sn, SiO_x. A source region and a drain region are contact with the first oxide semiconductor layer. The source region, the drain region, and a pixel electrode are formed by the second oxide semiconductor layer including In, Sn, O.
申请公布号 KR20100090641(A) 申请公布日期 2010.08.16
申请号 KR20100009515 申请日期 2010.02.02
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 OIKAWA YOSHIAKI;MARUYAMA HOTAKA;GODO HIROMICHI;KAWAE DAISUKE;YAMAZAKI SHUNPEI
分类号 H01L29/786;H01L21/363 主分类号 H01L29/786
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