| 摘要 |
PURPOSE: An electrostatic chuck including an aero sol coating layer and a method for manufacturing the same are provided to suppress the generation of arc by forming dense and smooth surface structure using yttria. CONSTITUTION: An electrostatic chuck absorbs an object using electrostatic force. The object is placed on the upper side of a dielectric plate(100). A dielectric thin film(102) is formed on the upper side of the dielectric plate by coating an aero sol. An electrode is arranged on inside or one side of the dielectric plate. The dielectric thin film is yttria thin film. The thickness of the dielectric thin film is between 0.5 and 100um.
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