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发明名称
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINES HALBLEITERBAUELEMENTS
摘要
申请公布号
AT476754(T)
申请公布日期
2010.08.15
申请号
AT20000105316T
申请日期
2000.03.16
申请人
KANEKA CORPORATION
发明人
KONDO, MASATAKA;HAYASHI, KATSUHIKO;KURIBE, EIJI
分类号
H01L31/18;H01L21/00
主分类号
H01L31/18
代理机构
代理人
主权项
地址
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