VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG VON PRIMÄRSTANDARDGASGEMISCHEN

摘要

Provided is a novel system and apparatus for producing primary standard gas mixtures. The system includes providing a gas permeation device having a constant diffusion rate into a temperature controlled enclosure; connecting a supply source of a component to the permeation device; routing the component from the gas permeation device to a product container until a desired amount of said component in the product container is reached; and supplying a balance of purified gas to the product container to obtain a known concentration of component in the primary standard gas mixture.