MANUFACTURING PROCESS OF HIGH-PURITY TRIS(TRIMETHYLSILYL) PHOSPHATE

摘要

PURPOSE: A method for preparing Tris(trimethylsilyl)phosphate is provided to obtain Tris(trimethylsilyl) phosphate of high purity at low temperature without solvent. CONSTITUTION: A method for preparing Tris(trimethylsilyl)phosphate comprises: a step of reacting phosphoric acid, hexamethyldisilazaen, quaternary ammonium salt, phosphonium salt and mixture thereof at 100-160°C for 5-20 hours to obtain crude Tris(trimethylsilyl)phosphate; and a step of purifying the crude Tris(trimethylsilyl)phosphate.