| 摘要 |
PROBLEM TO BE SOLVED: To ensure high damping characteristic, in a vibration eliminating device which elastically supports a vibration elimination object relative to a base, while attaining reduction in size and stabilization of vibration eliminating performance of the device. SOLUTION: The vibration eliminating device 1 which elastically supports a microscope 15 relative to a table 13 includes: a lower spring case 7 opened upward, which is placed on the table 13; an upper spring case 9 opened downward, which is attached to the microscope 15 side; a coil spring 3 housed between both the spring cases 7 and 9; and a ring rubber 5 attached to a bottom wall part 17 of the lower spring case 7 and disposed within loops 3a, 3a, etc. of the coil spring 3 so as to contact with the coil spring 3 from the inside. The coil spring 3 is formed of a square wire having a substantially rectangular sectional shape. COPYRIGHT: (C)2010,JPO&INPIT |
