| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method of a coating liquid which easily apply a coating liquid in high quality by highly precisely adjusting a gap between a mouthpiece and a substrate over the whole length of the mouthpiece with an excellent reproductivity and by stably keeping an adjusted state. SOLUTION: In a device for applying a coating liquid which includes a table fixing a substrate, a mouthpiece discharging a coating liquid, a mouthpiece holder supporting the mouthpiece by making the same face the substrate and a moving means for relatively moving the table and the mouthpiece, the mouthpiece holder has a mouthpiece holder substrate, a mouthpiece fixing means for fixing the mouthpieces to the mouthpiece holder substrate at a plurality of positions separating in a longitudinal direction of the mouthpieces and at least one load giving means for giving a load in a vertical direction onto the surface of the substrate against the mouthpieces, and the load giving means possesses a load generating part generating a load and a load adjusting mechanism adjusting the magnitude of the load. COPYRIGHT: (C)2010,JPO&INPIT |
