| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an orthogonal compensation method capable of assuring a complete resonance mode of a rotation rate sensor at any time point without degrading detection sensitivity and a signal-to-noise ratio of the rotation rate sensor. <P>SOLUTION: The orthogonal compensation method is provided for a micro-mechanical structure (1) including a substrate having a main extension plane, a vibration mass fixed to the substrate via a spring member, a first compensation electrode connected with the substrate and a second compensation electrode connected with the substrate wherein application of first orthogonal voltage between the first compensation electrode and the vibration mass causes first compensation force for the vibration mass and application of second orthogonal voltage between the second compensation electrode and the vibration mass causes second compensation force for the vibration mass. The problem is solved by adjusting the second orthogonal voltage depending on the first orthogonal voltage. An outlined process of the second orthogonal voltage U50 in the micro-mechanical structure 1 according to a first embodiment of the invention is shown. The outlined process of the second orthogonal voltage U50 is expressed as a square root function of the first orthogonal voltage U40. The first orthogonal voltage U40 is plotted in the axis of abscissa 300, while the second orthogonal voltage U50 is plotted in the axis of ordinates 301. It is found that the second orthogonal voltage U50 largely monotonously decreases as the first orthogonal voltage U40 increases. Second orthogonal voltage of the conventional art is shown as a seventh curve 302 for comparison, which is constant and does not depend on the first orthogonal voltage. <P>COPYRIGHT: (C)2010,JPO&INPIT |
