| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a structure which generates a uniform electric discharge in a discharge direction and is improved in discharge efficiency. <P>SOLUTION: Discharge electrode units 9 and 10 are provided with electrodes 2 and 3 and solid dielectrics which cover the electrodes 2 and 3. The discharge side surface of the solid dielectric is made of alumina and an oxide containing a rare earth element (RE), and includes, by mass%, 68-94% Al in terms of Al<SB>2</SB>O<SB>3</SB>and 6-32% rare earth element (RE) in terms of RE<SB>2</SB>O<SB>3</SB>. A discharge electrode assembly 100 is made of two discharge electrode units and these discharge electrode units are arranged so as to oppose to each other. A discharge treatment apparatus is structured so as to generate plasma by using the discharge electrode assembly. The discharge efficiency is thereby improved, and corrosion resistance to plasma of the discharge side surface of the discharge electrode unit is also improved. <P>COPYRIGHT: (C)2010,JPO&INPIT |
