| 摘要 |
<P>PROBLEM TO BE SOLVED: To restrain air spouted from a floating means from having a bad effect on a sensor above a slider section and reduce performance degradation of an entire apparatus. Ž<P>SOLUTION: This positioning apparatus includes the slider section on which an object is loaded, a platen for horizontally moving the slider section, the floating means for floating the slider section from the platen, a planar motor for horizontally moving the slider section floated by the floating means, an air feed section for feeding air to the floating means, a cooling section for cooling the air fed from the air feed section, a temperature sensor for detecting a temperature of the air spouted from the floating means, and a temperature control section for controlling the cooling section based on a detection result of the temperature sensor. The temperature control section controls the cooling section so that the temperature of the air spouted from the floating means may become lower than the detection result of the temperature sensor. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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