发明名称 INTERFEROMETER FOR OPTICALLY MEASURING AN OBJECT
摘要 An interferometer for optically measuring an object (10), including a light source (1), at least one beam splitter (2) and at least one detector (12a, 12b), with the beam splitter being arranged in the beam path of the light source such that a light beam created by the light source is split into a working beam (3) and a reference beam (4). The interferometer is embodied such that the working beam impinges on the object (10) to be measured and the working beam is at least partially reflected by the object and interfered with the reference beam on the detector (12a, 12b). Here it is essential that the interferometer is provided with a spatial light modulator, which comprises a hologram control unit (9) and a hologram reconstruction unit (8) connected thereto, with the hologram reconstruction unit being arranged in the beam path of the working beam between the beam splitter (2) and the object (10) and the hologram control unit (9) controlling the hologram reconstruction unit (8) such that the hologram reconstruction unit creates an optionally predetermined hologram such that the working beam is deflected and/or split by the hologram reconstruction unit.
申请公布号 US2010201990(A1) 申请公布日期 2010.08.12
申请号 US20100768979 申请日期 2010.04.28
申请人 POLYTEC GMBH 发明人 REMBE CHRISTIAN;HAIST TOBIAS
分类号 G01B9/021 主分类号 G01B9/021
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