| 摘要 |
When detecting an angular rate in a detecting element (1), when an angular rate occurs, it is detected on the basis of a first sum by adding output values issued from upper electrode of second sensing electrode part (19b) and upper electrode of fourth sensing electrode part (20b) both in positive polarity, a second sum by adding output values issued from upper electrode of first sensing electrode part (19a) and upper electrode of third sensing electrode part (20a) both in negative polarity, a third sum by adding output values issued from lower electrode of first sensing electrode part (19a) and lower electrode of third sensing electrode part (20a) both in positive polarity, and a fourth sum by adding output values issued from lower electrode of second sensing electrode part (19b) and lower electrode of fourth sensing electrode part (20b) both in negative polarity. In this configuration, the inertial force sensor enhanced in detection sensitivity is presented.
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