MAGNETIC CLIPS AND SUBSTRATE HOLDERS FOR USE IN A PLASMA PROCESSING SYSTEM

摘要

PURPOSE: Magnetic clips and substrate holders for use in a plasma processing system are provided to process a panel or both sides of a substrate by firmly supporting a flexible panel and a substrate. CONSTITUTION: A dischargeable space surrounds a vacuum chamber and the side of the vacuum chamber. The dischargeable space is acceded through an opening(20) inside the vacuum chamber. A chamber door(22) is adjacent to the opening. A sealing member(24) promotes the airtight sealing of the opening and the chamber door. An electrode is electrically connected to an RF generator.