| 摘要 |
PURPOSE: A cleaning nozzle and a cleaning apparatus including the same are provided to increase detergency by performing a distribution cleaning and an ultrasonic cleaning at the same time. CONSTITUTION: A substrate supporting unit supports a substrate. A rotating unit rotates the supporting unit. A cleaning solution injection nozzle(282) receives a cleaning solution from an inlet and injects it. A gas injection nozzle(286) injects gas from the end of the cleaning solution nozzle. An ultrasonic generator(289) applies ultrasonic vibration to the cleaning solution.
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