发明名称 SYSTEMS AND METHODS FOR RECYCLING SEMICONDUCTOR MATERIAL REMOVED FROM A RAW SEMICONDUCTOR BOULE
摘要 Methods of recycling excess semiconductor material removed from an unshaped semiconductor boule are disclosed. Excess semiconductor material is cut from an semiconductor unshaped boule thereby generating a shaped semiconductor boule. The excess semiconductor material is removed in the form of large pieces that can easily be cleaned and retrieved for reuse.
申请公布号 US2010199909(A1) 申请公布日期 2010.08.12
申请号 US20080524142 申请日期 2008.01.25
申请人 UNIVERSITY OF UTAH RESEARCH FOUNDATION 发明人 BAMBERG EBERHARD;RAKWAL DINESH R.;JORGENSEN DEAN;HARVEY IAN R.;FREE MICHAEL L.;BALAJI ALAGAR K.
分类号 C30B15/00;B23H7/02;B23H11/00 主分类号 C30B15/00
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