发明名称 |
SYSTEMS AND METHODS FOR RECYCLING SEMICONDUCTOR MATERIAL REMOVED FROM A RAW SEMICONDUCTOR BOULE |
摘要 |
Methods of recycling excess semiconductor material removed from an unshaped semiconductor boule are disclosed. Excess semiconductor material is cut from an semiconductor unshaped boule thereby generating a shaped semiconductor boule. The excess semiconductor material is removed in the form of large pieces that can easily be cleaned and retrieved for reuse.
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申请公布号 |
US2010199909(A1) |
申请公布日期 |
2010.08.12 |
申请号 |
US20080524142 |
申请日期 |
2008.01.25 |
申请人 |
UNIVERSITY OF UTAH RESEARCH FOUNDATION |
发明人 |
BAMBERG EBERHARD;RAKWAL DINESH R.;JORGENSEN DEAN;HARVEY IAN R.;FREE MICHAEL L.;BALAJI ALAGAR K. |
分类号 |
C30B15/00;B23H7/02;B23H11/00 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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