APPARATUS FOR MANUFACTURING THIN-FILM LAMINATE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a thin-film laminate capable of suppressing the occurrence of sagging and wrinkling of a flexible substrate over a wide range while conveying the belt-like flexible substrate in a vertical posture and compatible with the conveyance of the flexible substrate in the reverse direction.

SOLUTION: An apparatus for manufacturing a thin-film laminate laminates to form thin films on the surface of a substrate, while conveying the flexible substrate 1 in a horizontal direction by allowing its width direction to be the vertical direction. The apparatus for manufacturing a thin-film laminate is provided with: an upper nip roller 3 that can deliver the upper edge part of the flexible substrate while pinching it with a predetermined nip pressure; an upper stretching unit 100 including an upper supporting mechanism part for supporting the nip rollers to be able to rotate and contact with/separate from one another; a lower nip roller 3' that can deliver the lower edge part of the substrate while pinching it with the predetermined nip pressure; and a lower stretching unit 100' including the lower supporting mechanism part for supporting the nip rollers to be able to rotate and contact with/separate from one another. Each stretching unit can be switched to a first angle position (a) and a second angle position (b) having a deflection angle in the reverse direction of the first angle position.

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